Browsing by author "Wilkol, M."
Now showing items 1-2 of 2
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Ozonated DI-water for clean chemical oxide growth
Cornelissen, Ingrid; Meuris, Marc; Wolke, K.; Wilkol, M.; Loewenstein, Lee; Doumen, Geert; Heyns, Marc (1998) -
Ozonated DI-water for clean chemical oxide growth
Cornelissen, Ingrid; Meuris, Marc; Wolke, K.; Wilkol, M.; Loewenstein, Lee; Doumen, Geert; Heyns, Marc (1999)