Ozonated DI-water for clean chemical oxide growth

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Authors
Cornelissen, Ingrid; Meuris, Marc; Wolke, K.; Wilkol, M.; Loewenstein, Lee; Doumen, Geert; Heyns, Marc
Conference
4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
Ozonated DI-water for clean chemical oxide growth
Publication type
Oral presentation
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