Publication:

Ozonated DI-water for clean chemical oxide growth

Date

1998
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Author(s)

Cornelissen, Ingrid  
;
Meuris, Marc  
;
Wolke, K.
;
Wilkol, M.
;
Loewenstein, Lee
;
Doumen, Geert  
;
Heyns, Marc  

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1999 since deposited on 2021-09-30
Acq. date: 2026-02-27

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1999 since deposited on 2021-09-30
Acq. date: 2026-02-27

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