Browsing by author "Vanhaelemeersch,"
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Plasma modification of porous low-k dielectrics
Le, Quoc Toan; Whelan, Caroline; Struyf, Herbert; Bender, Hugo; Conard, Thierry; Brongersma, Sywert; Boullart, Werner; Vanhaelemeersch,; Maex, Karen (2004-09)