Publication:

Plasma modification of porous low-k dielectrics

Date

2004-09

Journal article

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Author(s)

;

Whelan, Caroline

;

Struyf, Herbert

;

;

Conard, Thierry

;

Brongersma, Sywert

;

Boullart, Werner

;

Vanhaelemeersch,

;

Journal

Electrochemical and Solid-State Letters

Metrics

1866 since deposited on 2021-10-15

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Acq. date: 2025-12-17