Publication:

Plasma modification of porous low-k dielectrics

Date

2004-09
Journal article
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorWhelan, Caroline
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch,
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-15T14:24:04Z
dc.date.available2021-10-15T14:24:04Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9186
dc.source.beginpageF49
dc.source.endpageF53
dc.source.issue9
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume7
dc.title

Plasma modification of porous low-k dielectrics

dc.typeJournal article
dspace.entity.typePublication
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