Browsing by author "Zakel, Julia"
Now showing items 1-3 of 3
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Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2019) -
New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Kayser, Sven; Pirkl, Alexander; Zakel, Julia; Franquet, Alexis; Spampinato, Valentina (2020)