Browsing by author "Barry, Kelly"
Now showing items 1-3 of 3
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3D Contact hole metrology accuracy and stability
Storms, Greet; Barry, Kelly; Cheng, Shaunee (2005) -
90nm technology contact CD performance characterization via ODP scatterometry
Barry, Kelly; Cheng, Shaunee; Storms, Greet (2005) -
Metrology accuracy and stability: the fundamental baseline for process monitoring and control
Storms, Greet; Barry, Kelly; Cheng, Shaunee (2005)