Browsing by author "Peikert, Milko"

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Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring

Halder, Sandip; Mols, Yves; Van Den Heuvel, Dieter; Van Puymbroeck, Jan; Caymax, Matty; Vancoille, Eric; Nieuborg, Nancy; Bast, Gerhard; Simpson, Gavin; Peikert, Milko; Polli, Marco; Ulea, Neli; Seong, Ho Yoo (2014)