Browsing by author "Masaoku, Toru"
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Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
Wostyn, Kurt; Dhayalan, Sathish Kumar; Gencarelli, Federica; Masaoku, Toru; Iino, Hideaki; Yoshida, Yukifumi; Komori, Kana; Douhard, Bastien; Hikavyy, Andriy; Loo, Roger; Holsteyns, Frank (2018-05)