Authors

Wostyn, Kurt; Dhayalan, Sathish Kumar; Gencarelli, Federica; Masaoku, Toru; Iino, Hideaki; Yoshida, Yukifumi; Komori, Kana; Douhard, Bastien; Hikavyy, Andriy; Loo, Roger; Holsteyns, Frank

Conference

9th International SiGe Technology and Device Meeting / 11th International Conference on Silicon Epitaxy and Heterostructures

Title

Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning

Publication type

Meeting abstract