Publication:
Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
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1973 since deposited on 2021-10-26
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Acq. date: 2026-10-11
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Statistics
Views
1973 since deposited on 2021-10-26
2last month
2last week
Acq. date: 2026-10-11
Citations