Publication:
Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
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1957 since deposited on 2021-10-26
Acq. date: 2025-10-27
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Views
1957 since deposited on 2021-10-26
Acq. date: 2025-10-27
Citations