Browsing by author "Kim, Chul-Sung"

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    • Ion-implantation-based low-cost Hk/MG process for CMOS low-power application 

      Ortolland, Claude; Sahhaf, Sahar; Srividya, Vidya; Degraeve, Robin; Saino, Kanta; Kim, Chul-Sung; Gilbert, Matthieu; Kauerauf, Thomas; Cho, Moon Ju; Dehan, Morin; Schram, Tom; Togo, Mitsuhiro; Horiguchi, Naoto; Groeseneken, Guido; Biesemans, Serge; Absil, Philippe; Vandervorst, Wilfried; Gealy, Dan; Hoffmann, Thomas Y. (2010)