Browsing by author "Illiberi, Andrea"

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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

Sinha, Jyoti; Gallis, Leonidas; Clerix, Jan-Willem; van der Veen, Marleen; Innocent, Jerome; Illiberi, Andrea; Givens, Michael; Nyns, Laura; Delabie, Annelies (2024)