Browsing by author "Santaclara, J. Garcia"
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Tone reversal patterning for advanced technology nodes
Schleicher, Filip; Bekaert, Joost; Thiam, Arame; Decoster, Stefan; Blanc, Romuald; Lazzarino, Frederic; Santaclara, J. Garcia; Rispens, G.; Maslow, M. (2022)