Browsing by author "Womington, Matthew"
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High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices
Ryan, Paul; Womington, Matthew; Sun, Jianwu; Hikavyy, Andriy; Shimura, Yosuke; Witters, Liesbeth; Tielens, Hilde; Schulze, Andreas; Loo, Roger (2015)