Browsing by author "Sagi, Kaushik"
Now showing items 1-3 of 3
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Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
Sagi, Kaushik; Babu, S.V.; van der Veen, Marleen; Struyf, Herbert; Teugels, Lieve (2016) -
Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
Amanapu, Hariprasad; Sagi, Kaushik; Teugels, Lieve; Babu, S.V. (2013) -
The effect of material texture in the CMP of ruthenium films
Teugels, Lieve; Amanapu, Hariprasad; Sagi, Kaushik; Heylen, Nancy; Babu, S.V. (2013)