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Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
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Authors
Sagi, Kaushik
;
Babu, S.V.
;
van der Veen, Marleen
;
Struyf, Herbert
;
Teugels, Lieve
Conference
Materials for Advanced Metallization Conference - MAM
Title
Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
Publication type
Meeting abstract
Embargo date
9999-12-31
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