Publication:
Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
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1926 since deposited on 2021-10-23
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Acq. date: 2026-04-17
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Statistics
Views
1926 since deposited on 2021-10-23
2last month
1last week
Acq. date: 2026-04-17
Citations