Publication:

Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes

Date

2016
Meeting abstract
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cris.virtual.orcid0000-0002-6782-5424
cris.virtual.orcid0000-0002-9402-8922
cris.virtual.orcid0000-0002-6613-9414
cris.virtualsource.department71656083-4e54-41a6-8b58-909e9d5aed91
cris.virtualsource.departmentc1a63b50-1a38-44ad-8601-a914848c9cca
cris.virtualsource.department46285a91-3db4-4d39-a458-2025fc0d9d8a
cris.virtualsource.orcid71656083-4e54-41a6-8b58-909e9d5aed91
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cris.virtualsource.orcid46285a91-3db4-4d39-a458-2025fc0d9d8a
dc.contributor.authorSagi, Kaushik
dc.contributor.authorBabu, S.V.
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTeugels, Lieve
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.accessioned2021-10-23T14:29:23Z
dc.date.available2021-10-23T14:29:23Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27253
dc.source.beginpage147
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
dc.source.endpage148
dc.title

Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes

dc.typeMeeting abstract
dspace.entity.typePublication
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