Browsing by author "Van Herp, Bart"
Now showing items 1-4 of 4
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Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Determination of photoresist degradation products in O3/DI water processing
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc (2001) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc (2002)