Authors

Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc

Conference

200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac

Title

Removal of photoresist by O3DI water processes: determination of degradation products

Publication type

Meeting abstract