Browsing by author "Kondo, S."
Now showing items 1-3 of 3
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Impact of an etched EUV mask black border on imaging and overlay
Davydova, N.; de kruif, R.; Fukugami, N.; Kondo, S.; Philipsen, Vicky; Van Setten, E.; Connolly, B.; Lammers, A.; Vaenkatesan, V.; Zimmerman, J.; Harned, N. (2012) -
Investigation of barrier and slurry effects on the galvanic corrosion of copper
Ernur, Didem; Kondo, S.; Shamiryan, Denis; Maex, Karen (2002) -
Narrow trench corrosion of copper damascene interconnects
Ernur, Didem; Kondo, S.; Maex, Karen (2002)