Browsing by author "Carbajal, Diego"

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From surface dependence in atomic layer deposition to area-selective deposition of TiN

Delabie, Annelies; Carbajal, Diego; Soethoudt, Job; Chan, BT; Altamirano Sanchez, Efrain; Meynaerts, Ben; Clerix, Jan-Willem; Van Elshocht, Sven (2019)