Browsing by author "Mukundhan, Priya"
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Imaging of buried overlay and alignment markers using picosecond acoustic microscopy
Mehendale, Manjusha; Antonelli, Andy; Mair, Robin; Mukundhan, Priya; Bogdanowicz, Janusz; Blanco, Victor; Charley, Anne-Laure; Leray, Philippe (2022) -
Non-destructive in-line IMC thickness measurement using acoustic metrology
Mukundhan, Priya; Hou, Lin; Derakhshandeh, Jaber; Liebens, Maarten (2019)