Browsing by author "Peddeti, Shivaji"
Now showing items 1-3 of 3
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Chemical mechanical polishing of Ge using colloidal silica particles and H2O2
Ong, Patrick; Peddeti, Shivaji; Leunissen, Peter; Babu, S. V. (2011) -
Chemical mechanical polishing of InP
Ong, Patrick; Peddeti, Shivaji; Leunissen, Peter; Babu, S.V. (2012) -
CMP of Ge and InP for microelectronic applications
Ong, Patrick; Peddeti, Shivaji; Leunissen, Peter; Babu, S.V. (2011)