Browsing by author "Steckenrider, J. S."
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Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications
Mills, C. R.; Grover, G. S.; Mueller, B. L.; Steckenrider, J. S.; Ganeshkumar, S.; Leach, G. W.; Huang, C. K.; Grillaert, Joost (1997)