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Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications
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Authors
Mills, C. R.
;
Grover, G. S.
;
Mueller, B. L.
;
Steckenrider, J. S.
;
Ganeshkumar, S.
;
Leach, G. W.
;
Huang, C. K.
;
Grillaert, Joost
Conference
Proceedings 2nd International Chemical-Mechanical Polish (C.M.P.) for ULSI Multilevel Interconnection Conference - CMP-MIC
Title
Raising oxide: nitride selectivity to aid in the CMP of shallow trench isolation type applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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