Browsing by author "Roozeboom, Fred"

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Materials and electrical characterization of metal gate electrodes on high-k dielectrics for advanced CMOS technologies

Hooker, Jacob; Lander, Rob; Rittersma, Chris; Schram, Tom; Lujan, Guilherme; van Zijl, Jeroen; van den Heuvel, Eric; Roozeboom, Fred (2002)