Browsing by author "Verni, Giuseppe"
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Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
Pasquali, Mattia; De Gendt, Stefan; Armini, Silvia; Illiberi, Andrea; Verni, Giuseppe; Deng, Shaoren; Givens, Michael (2018)