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Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
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1982 since deposited on 2021-10-26
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Acq. date: 2025-10-24
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Metrics
Views
1982 since deposited on 2021-10-26
423item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations