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Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
Publication:
Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
Date
2018
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pasquali, Mattia
;
De Gendt, Stefan
;
Armini, Silvia
;
Illiberi, Andrea
;
Verni, Giuseppe
;
Deng, Shaoren
;
Givens, Michael
Journal
Abstract
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1981
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations
Metrics
Views
1981
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations