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Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning

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2000 since deposited on 2021-10-26
10last month
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Acq. date: 2026-08-18

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Views

2000 since deposited on 2021-10-26
10last month
2last week
Acq. date: 2026-08-18

Citations