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Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning

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1989 since deposited on 2021-10-26
2last month
Acq. date: 2026-05-19

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1989 since deposited on 2021-10-26
2last month
Acq. date: 2026-05-19

Citations