Browsing by author "Kovacs, Fredi"
Now showing items 1-3 of 3
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Etching and cleaning of HfO2 deposited on Si
Snow, Jim; Kraus, Harald; Van Doorne, Patrick; Mertens, Paul; Kovacs, Fredi (2002-11) -
Selective single-wafer wet etching of Hf-based layers
Snow, Jim; Kraus, Harald; Kovacs, Fredi; Claes, Martine; Paraschiv, Vasile; Vos, Rita; Mertens, Paul; De Gendt, Stefan; Heyns, Marc; Archer, Leo (2005) -
Selective wet etching of nickel
Snow, Jim; Kraus, Harald; Fano Leston, Vanessa; Xu, Kaidong; Mertens, Paul; Kovacs, Fredi (2005-04)