Browsing by author "Kjaer, Daniel"

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Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch H.; Hansen, Ole; Hansen, Torben M.; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick S.; Cowern, Nick E.B. (2009)
Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch; Hansen, Ole; Hansen, Torben; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick; Cowern, Nick (2010)