Browsing by author "Monnoyer, Philippe"

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Arf solutions for low-k1 back-end imaging

Wiaux, Vincent; Montgomery, Patrick; Vandenberghe, Geert; Monnoyer, Philippe; Ronse, Kurt; Conley,; Litt,; Lucas,; Finders, Jo; Socha,; Van Den Broeke, (2003)
Optical extensions towards the 45-nm node

Hendrickx, Eric; Monnoyer, Philippe; Van Look, Lieve; Vandenberghe, Geert (2004)