Browsing by author "Ho, Paul"
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Plasma processing of low-k dielectrics
Shi, Hualiang; Shamiryan, Denis; de Marneffe, Jean-Francois; Huang, Huai; Ho, Paul; Baklanov, Mikhaïl (2012) -
Preface
Baklanov, Mikhaïl; Ho, Paul; Zschech, Ehrenfried (2012)