Plasma processing of low-k dielectrics

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Authors
Shi, Hualiang; Shamiryan, Denis; de Marneffe, Jean-Francois; Huang, Huai; Ho, Paul; Baklanov, Mikhaïl
Book
Advanced Interconnects for ULSI Technology
Title
Plasma processing of low-k dielectrics
Publication type
Book chapter
Embargo date
9999-12-31
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