Browsing by author "Alagna, Paolo"
Now showing items 1-5 of 5
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Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery
Alagna, Paolo; Rechtsteiner, G.; Conley, W.; Cross, A.; Sah, K.; Halder, Sandip (2017) -
Improving on-wafer CD correlation analysis using advanced diagnostics and across-wafer light-source monitoring
Alagna, Paolo; Zurita, Omar; Rechtsteiner, Greg; Lalovic, Ivan; Bekaert, Joost (2014) -
Lithography imaging control by enhanced monitoring of light source performance
Alagna, Paolo; Zurita, Omar; Lalovic, Ivan; Seong, Nakgeuon; Rechsteiner, Gregory; Thornes, Joshua; D'have, Koen; Van Look, Lieve; Bekaert, Joost (2013) -
Optimum ArFi laser bandwidth for10nm node logic imaging performance
Alagna, Paolo; Zurita, Omar; Timoshkov, Vadim; Wong, Patrick; Rechtsteiner, Gregory; Baselmans, Jan; Mailfert, Julien (2015) -
Tunable bandwidth for application-specific SAxP process enhancement
Alagna, Paolo; Conley, Will; Rechsteiner, Greg; Nafus, Kathleen; Biesemans, Serge; Lorusso, Gian (2018)