Browsing by author "Panneerchelvam, Prem"
Now showing items 1-1 of 1
-
Evolution of lithography-to-etch bias in multi-patterning processes
Panneerchelvam, Prem; Agarwal, Ankur; Huard, Chad M. M.; Pret, Alessandro Vaglio; Mani, Antonio; Gronheid, Roel; Demand, Marc; Kumar, Kaushik; Paolillo, Sara; Lazzarino, Frederic (2022)