Browsing by author "Westlinder, J."
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On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices
Westlinder, J.; Schram, Tom; Pantisano, Luigi; Cartier, Eduard; Kerber, Andreas; Lujan, Guilherme; Olsson, J.; Groeseneken, Guido (2003) -
On the thermal stability of Atomic Layer Deposition (ALD) TiN as gate electrode in MOS devices
Westlinder, J.; Schram, T.; Pantisano, Luigi; Cartier, Eduard; Kerber, Andreas; Lujan, Guilherme; Groeseneken, Guido (2002)