Browsing by author "Rajagopal, A."

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Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resin

Lemaire, J. J.; Rajagopal, A.; Gregoire, C.; Pireaux, J. J.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Waeterloos, Joost (1999)
Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

Rajagopal, A.; Grégoire, C.; Lemaire, J. J.; Pireaux, J. J.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Waeterloos, Joost (1999)