Browsing by author "Stehlé, J.L."

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Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)

Sun, L.; Defranoux, C.; Stehlé, J.L.; Boher, P.; Evrard, P.; Bellandi, E.; Bender, Hugo (2004)
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Boher, P.; Evrard, P.; Defranoux, C.; Darragon, A.; Sun, Lianchao; Fouere, J.C.; Stehlé, J.L.; Bellandi, E.; Bender, Hugo (2003-12)