Authors

Boher, P.; Evrard, P.; Defranoux, C.; Darragon, A.; Sun, Lianchao; Fouere, J.C.; Stehlé, J.L.; Bellandi, E.; Bender, Hugo

Conference

MRS Fall Meeting Symposium E: Fundamentals of Novel Oxide/Semiconductor Interfaces

Title

High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Publication type

Proceedings paper