Publication:
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry
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1937 since deposited on 2021-10-15
3last month
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Acq. date: 2025-12-11
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Views
1937 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2025-12-11
Citations