Publication:
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry
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1932 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1932 since deposited on 2021-10-15
414item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations