Publication:
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry
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1938 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-09
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Statistics
Views
1938 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-09
Citations