Browsing by author "Hagberg, Mats"

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Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

Passi, Vikram; Sodervall, Ulf; Nilsson, Bengt; Petersson, Bengt; Hagberg, Mats; Krzeminski, Christophe; Dubois, Emmanuel; Du Bois, Bert; Raskin, Jean-Pierre (2012)