Browsing by imec author "7927f00a3a3f3dd2905d568ed51bc9ef12b308ee"
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Metal reliability mechanisms in Ruthenium interconnects
Varela Pedreira, Olalla; Stucchi, Michele; Gupta, Anshul; Vega Gonzalez, Victor; van der Veen, Marleen; Lariviere, Stephane; Wilson, Chris; Tokei, Zsolt; Croes, Kristof (2020)