Browsing by author "Buccheri, Nunzio"

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    • BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP 

      Hermans, Yannick; Wu, Chen; Buccheri, Nunzio; Schleicher, Filip; Versluijs, Janko; Montero Alvarez, Daniel; Dey, Bappaditya; Wong, Patrick; Rincon Delgadillo, Paulina; Park, Seongho; Tokei, Zsolt; Leray, Philippe; Halder, Sandip (2023-04-28)

    • Improving uniformity of 3-level High Aspect Ratio Supervias 

      Montero Alvarez, Daniel; Marien, Philippe; Hermans, Yannick; Vega Gonzalez, Victor; Feurprier, Y.; Oikawa, N.; Buccheri, Nunzio; Wu, Chen; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Decoster, Stefan; Kumar, K.; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2023)