Browsing by author "Shaphirov, D."

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Moiré effect-based Overlay target design for OPO improvements

Van Den Heuvel, Dieter; Leray, Philippe; Hajaj, E.; Shaphirov, D.; Ashwal, E.; Dror, C.; Yohanan, R.; Ghinovker, M.; Gordon, K.; Liu, Z.; Liu, X.; Gronheid, Roel; Spielberg, H. (2021)