Browsing by author "Bergmann, Klaus"

Now showing items 1-1 of 1

    • Optical testing of EUV pellicle materials 

      Pollentier, Ivan; Vanpaemel, Johannes; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Gallagher, Emily; Brose, Sasha; Danylyuk, Serhij; Bergmann, Klaus (2015)