Browsing by author "Guittet, Pierre-Yves"
Now showing items 1-3 of 3
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High speed full wafer monitoring of surface, edge and bonding interface for 3D-stacking
Halder, Sandip; Jourdain, Anne; Phommahaxay, Alain; Miller, Andy; Guittet, Pierre-Yves (2011) -
In-line process variance monitoring of advanced 3D TSV production lines
Guittet, Pierre-Yves; Markwort, Lars; Savage, Greg; Jourdain, Anne; Halder, Sandip (2010) -
Ultra-fast in-line metrology for 3D SIC TSV line - Bonding & thinning
Guittet, Pierre-Yves; Markwort, Lars; Savage, Greg; Halder, Sandip; Jourdain, Anne (2010)